Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN
Author:
Affiliation:
1. Department of Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Franz-Josef-Strasse 18, 8700 Leoben, Austria
2. MIBA High Tech Coatings, Dr.-Mitterbauer-Strasse 3, 4655 Vorchdorf, Austria
Funder
Österreichische Forschungsförderungsgesellschaft (FFG)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4954949
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