Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN∕CrN physical vapor deposition coatings-Reference-Cited by-同舟云学术

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Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN∕CrN physical vapor deposition coatings

Published:2009-03 Issue:2 Volume:27 Page:174-182
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sáfrán G.,Reinhard C.,Ehiasarian A. P.,Barna P. B.,Székely L.,Geszti O.,Hovsepian P. Eh.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3065675

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Recent Studies on the Fabrication of Multilayer Films by Magnetron Sputtering and Their Irradiation Behaviors;Coatings;2021-11-29

5. Tribological properties and microstructure of monolayer and multilayer Ta coatings prepared by magnetron sputtering;Vacuum;2021-07

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