1. Design and fabrication of Fresnel zone plates with large numbers of zones;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11
2. Fabrication of 0.2 μm large scale integrated circuits using synchrotron radiation x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
3. A novel technique for high aspect ratio high resolution patterning of membranes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
4. Patterning Characteristics of0.1-µmLine-and-Space Pattern in Synchrotron Radiation Lithography;Japanese Journal of Applied Physics;1994-11-15
5. Wavelength dependence of exposure window and resist profile in x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11