Particle-in-cell simulations and passive bulk model of collisional capacitive discharge-Reference-Cited by-同舟云学术

Particle-in-cell simulations and passive bulk model of collisional capacitive discharge

Published:2020-03 Issue:2 Volume:38 Page:023003
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kawamura Emi¹^ORCID,Lieberman Michael A.¹^ORCID,Lichtenberg Allan J.¹,Chabert Pascal²^ORCID

Affiliation:

1. Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720

2. Laboratoire de Physique des Plasmas, CNRS, Sorbonne Universités, UPMC Univ. Paris 06, Univ. Paris-Sud, Ecole Polytechnique, 91128 Palaiseau, France

Funder

U.S. Department of Energy

Applied Materials

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.5135575

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