Epitaxial growth of highly textured ZnO thin films on Si using an AlN buffer layer by atomic layer deposition-Reference-Cited by-同舟云学术

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Epitaxial growth of highly textured ZnO thin films on Si using an AlN buffer layer by atomic layer deposition

Published:2021-05 Issue:3 Volume:39 Page:032401
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kolhep Maximilian¹^ORCID,Sun Cheng²^ORCID,Bläsing Jürgen³^ORCID,Christian Björn²,Zacharias Margit¹^ORCID

Affiliation:

1. Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany

2. Department of Sustainable Systems Engineering, University of Freiburg, Freiburg, Germany

3. Institute of Physics, Otto-von-Guericke-University Magdeburg, Magdeburg, Germany

Funder

Graduate School of Robotics, University of Freiburg

Deutsche Forschungsgemeinschaft

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0000793

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of deposition time on properties of the ZnO by USD Method;Revista Mexicana de Física;2024-05-01

2. Study on the Fabrication of Uv Led Based on Au/I-Aln/N-Gan Structure and the Effect of Operating Temperature on the Carrier Transmission and Electroluminescence Characteristics;2024

3. The microstructural evolution of sputtered ZnO epitaxial films to stress-relaxed nanorods;Thin Solid Films;2023-10

4. Spontaneous and Position-Controlled Epitaxial Growth of ZnO Nanowires on AlN/Si by CVD;Crystal Growth & Design;2023-09-04

5. Atomic Layer Deposition and Strain Analysis of Epitaxial GaN-ZnO Core–Shell Nanowires;Nano Letters;2023-07-27

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