Oxidative molecular layer deposition of PEDOT using volatile antimony(V) chloride oxidant
Author:
Affiliation:
1. Department of Chemical and Biomolecular Engineering, North Carolina State University, Raleigh, North Carolina 27603, USA
2. Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27603, USA
Funder
Division of Industrial Innovation and Partnerships
Semiconductor Research Corporation
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
https://avs.scitation.org/doi/am-pdf/10.1116/6.0000791
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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2. Real-Time Nitrate Ion Monitoring with Poly(3,4-ethylenedioxythiophene) (PEDOT) Materials;Sensors;2023-09-03
3. Compressible sponge electrodes by oxidative molecular layer deposition (oMLD) of polyethylenedioxythiophene (PEDOT) onto open-cell polyurethane sponges;Nanotechnology;2023-09-01
4. Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten;Chemistry of Materials;2023-05-22
5. Effects of film thickness on electrochemical properties of nanoscale polyethylenedioxythiophene (PEDOT) thin films grown by oxidative molecular layer deposition (oMLD);Nanoscale;2023
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