Author:
Horwitz Chris M.,Puzzer T.,Smith A. M.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Analytical model for the radio-frequency sheath;Physical Review E;2013-12-03
2. The Low-Pressure Plasma Processing Environment;Handbook of Physical Vapor Deposition (PVD) Processing;1998
3. Nonlinearity of the radio‐frequency sheath;Journal of Applied Physics;1996-04
4. Self-consistent modelling of low-pressure RF discharges in oxygen plasma;Journal of Physics D: Applied Physics;1995-07-14
5. Radio-frequency Ar sputter etch rates: Theory and experiment;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-09