Self-aligned silicon field emission cathode arrays formed by selective, lateral thermal oxidation of silicon
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigations on the long-term performance of gated p-type silicon tip arrays with reproducible and stable field emission behavior;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-01
2. FABRICATION AND CHARACTERISTICS OF SILICON MICRO-TIP ARRAYS;International Journal of Modern Physics B;2010-11-10
3. Photoresponse of gated p-silicon field emitter array and correlation with theoretical models;Journal of Applied Physics;2006-02
4. Low leakage current optically gated silicon field emitter arrays;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003
5. Multi-tip cones induced by ion-bombardment;Vacuum;2002-06
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