Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films-Reference-Cited by-同舟云学术

Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films

Published:2018-07 Issue:4 Volume:36 Page:041502
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Le Tulzo Harold¹,Schneider Nathanaelle²,Lincot Daniel²,Patriarche Gilles³,Donsanti Frédérique⁴

Affiliation:

1. Institut Photovoltaïque Ile de France (IPVF), 30 route départementale 128, 91120 Palaiseau, France and French Environment and Energy Management Agency (ADEME), 20 avenue du Grésillé, 49004 Angers, France

2. Institut Photovoltaïque Ile de France (IPVF), 30 route départementale 128, 91120 Palaiseau, France and CNRS, Institut Photovoltaïque Ile de France (IPVF), UMR 9006, 30 route départementale 128, 91120 Palaiseau, France

3. Centre de Nanosciences et de Nanotechnologies, CNRS, Université Paris Sud, Université Paris Saclay, route de Nozay, 91460 Marcoussis, France

4. Institut Photovoltaïque Ile de France (IPVF), 30 route départementale 128, 91120 Palaiseau, France and EDF R&D, 30 route départementale 128, 91120 Palaiseau, France

Funder

Électricité de France

Agence de l'Environnement et de la Maîtrise de l'Energie

Agence Nationale de la Recherche

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5030990

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Doped SnO₂ thin films fabricated at low temperature by atomic layer deposition with a precise incorporation of niobium atoms;Nanotechnology;2024-07-04

2. Impact of atomic layer deposition temperature on electrical and optical properties of ZnO:Al films;Journal of Science: Advanced Materials and Devices;2024-06

3. Fine tuning of Nb-incorporated TiO2 thin films by atomic layer deposition and application as efficient electron transport layer in perovskite solar cells;Journal of Vacuum Science & Technology A;2024-03-29

4. Transparent Porous ZnO|Metal Complex Nanostructured Materials: Application to Electrocatalytic CO₂ Reduction;ACS Applied Nano Materials;2023-06-12

5. Impact of Atomic Layer Deposition Temperature on Electrical and Optical Properties of Zno:Al Films;2023