Surface roughness of nitrided (0001) Al[sub 2]O[sub 3] and AlN epilayers grown on (0001)Al[sub 2]O[sub 3] by reactive molecular beam epitaxy
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Published:1997-07
Issue:4
Volume:15
Page:921
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
17 articles.
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