Author:
Kim Nam-Sik,Cha Han-Seob,Sung Nag-Kyun,Ryu Hyuk-Hyun,Youn Ki-Seog,Lee Won-Gyu
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Quantitative Evaluation of Cobalt Disilicide/Si Interfacial Roughness;ECS Journal of Solid State Science and Technology;2017
2. Transmission Electron Microscope-Induced Structural Evolution in Amorphous Fe, Co, and Ni Oxide Nanoparticles;Langmuir;2008-06-10
3. Silicides;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
4. CoSi[sub x] thermal stability on narrow-width polysilicon resistors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
5. Thermal stability study on nanoscale polysilicide resistors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006