Research in optical films for the applications of integrated optics
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Published:1975-07
Issue:4
Volume:12
Page:892-904
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Tien P. K.,Ballman A. A.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
17 articles.
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