Multilayer on-chip stacked Fresnel zone plates: Hard x-ray fabrication and soft x-ray simulations-Reference-Cited by-同舟云学术

Multilayer on-chip stacked Fresnel zone plates: Hard x-ray fabrication and soft x-ray simulations

Published:2015-11 Issue:6 Volume:33 Page:06FD04
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Li Kenan¹,Wojcik Michael J.²,Ocola Leonidas E.³,Divan Ralu³,Jacobsen Chris⁴

Affiliation:

1. Applied Physics, Northwestern University, Evanston, Illinois 60208

2. X-ray Science Division, Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439

3. Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois 60439

4. X-ray Science Division, Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439; Department of Physics & Astronomy, Northwestern University, Evanston, Illinois 60208; Applied Physics, Northwestern University, Evanston, Illinois 60208; and Chemistry of Life Processes Institute, Northwestern University, Evanston, Illinois 60208

Funder

Office of Science, US Department of Energy

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4935252

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3. Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11

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