Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate
Author:
Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-97-1678-4_26
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4. Chen, G., Ju, B., Fang, H., Chen, Y., Wan, Y.: Air bearing: academic insights and trend analysis. Int. J. Adv. Manuf. Technol. 106 (2020)
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