A Comparative Study of Cantilever Profiles for MEMS Applications
Author:
Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-97-3651-5_11
Reference18 articles.
1. Manvi M, Mruthyunjaya Swamy KB (2022) Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A Review. Microelectron Eng 263(July):111854
2. Zhang H-Y, Pan H-Q, Tang J-L (2012) Cantilever sensors for chemical and biological applications in liquid. Chin J Anal Chem 40(5):801–808
3. Youssry M, Belmiloud N, Caillard B, Ayela C, Pellet C, Dufour I (2010) A straightforward determination of fluid viscosity and density using cantilevers: analytical and experimental studies. Procedia Eng 5:1035–1038
4. Kim D, Hong S, Jang J, Park J (2017) Determination of fluid density and viscosity by analyzing flexural wave propagations on the vibrating micro-cantilever. Sensors (Switzerland) 17(11)
5. Cakmak O, Ermek E, Kilinc N, Yaralioglu GG, Urey H (2015) Sensors and actuators a: physical precision density and viscosity measurement using two cantilevers with different widths. Sens Actuators A Phys 232:141–147
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