Non-linear Compensated Dwell Time for Efficient Fused Silica Surface Figuring Using Inductively Coupled Plasma-Reference-Cited by-同舟云学术

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Non-linear Compensated Dwell Time for Efficient Fused Silica Surface Figuring Using Inductively Coupled Plasma

Published:2018-01-27 Issue:2 Volume:38 Page:443-459
ISSN:0272-4324
Container-title:Plasma Chemistry and Plasma Processing
language:en
Short-container-title:Plasma Chem Plasma Process

Author:

Dai Zuocai,Xie Xuhui,Chen Heng,Zhou Lin

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Link

http://link.springer.com/article/10.1007/s11090-018-9873-7/fulltext.html

Reference24 articles.

1. Li N, Wang B, Jin H (2014) Harbin Inst Technol 21(5):124–128

2. Wang Z, Wu Y, Dai Y (2007) Aviat Precis Manuf Technol 43(5):1–5

3. Nie X, Li S, Dai Y, Song C (2013) Proc SPIE Int Soc Opt Eng 8786(22):11306–11312

4. Shen J, Liu S, Yi K, He H, Shao J, Fan Z (2005) Optik Int J Light Electron Opt 116(6):288–294

5. Wang Y, Hang L, Hu M (2008) Surf Technol 37(1):51–53

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