Intrinsic stress of ultrathin epitaxial films

Author:

Koch R.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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3. Internal stress analysis of electroplated films based on electron theory;Transactions of Nonferrous Metals Society of China;2016-09

4. Epitaxial growth of tungsten layers on MgO(001);Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-11

5. Microcantilever-Based Nano-Electro-Mechanical Sensor Systems: Characterization, Instrumentation, and Applications;Materials and Failures in MEMS and NEMS;2015-09-19

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