Funder
the National Key Research and Development Program of China
Tianjin Science and Technology Program
National Postdoctoral Program for Innovative Talents of China
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Reference28 articles.
1. S. Zhang, S. To, S. Wang, Z. Zhu, A review of surface roughness generation in ultra-precision machining. Int. J. Mach. Tool. Manuf. 91, 76 (2015)
2. X. Liu, X. Zhang, F. Fang, Z. Zeng, H. Gao, X. Hu, Influence of machining errors on form errors of microlens arrays in ultra-precision turning. Int. J. Mach. Tool. Manuf. 96, 80 (2015)
3. F. Chen, S. Yin, H. Huang, H. Ohmori, Y. Wang, Y. Fan, Y. Zhu, Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement. Int. J. Mach. Tool. Manuf. 50, 480 (2010)
4. S. Wang, S. To, C.F. Cheung, An investigation into material-induced surface roughness in ultra-precision milling. Int. J. Mach. Tool. Manuf. 68, 607 (2013)
5. D. Li, B. Wang, Z. Qiao, X. Jiang, Ultraprecision machining of microlens arrays with integrated on-machine surface metrology. Opt. Express 27, 212 (2019)