Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface-Reference-Cited by-同舟云学术

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Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

Published:2018-03 Issue:1 Volume:1 Page:45-57
ISSN:2520-811X
Container-title:Nanomanufacturing and Metrology
language:en
Short-container-title:Nanomanuf Metrol

Author:

Shimizu Yuki,Matsuno Yuki,Chen Yuan-Liu,Matsukuma Hiraku,Gao Wei

Funder

Japan Society for the Promotion of Science

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Materials Science (miscellaneous)

Link

http://link.springer.com/article/10.1007/s41871-018-0007-x/fulltext.html

Reference23 articles.

1. Marchon B, Olson T (2009) Magnetic spacing trends: from LMR to PMR and beyond. IEEE Trans Magn 45:3608–3611

2. May GS, Sze SM (2004) Fundamentals of semiconductor fabrication. Wiley, New York

3. Tsai DM, Luo JY (2011) Mean shift-based defect detection in multicrystalline solar wafer surfaces. IEEE Trans Industr Inf 7(1):125–135

4. Brinksmeier E, Mutlugünes Y, Klocke F, Aurich JC, Shore P, Ohmori H (2010) Ultra-precision grinding. CIRP Ann Manuf Technol 59(2):652–671

5. International Roadmap for Devices and Systems 2016 Edition. https://irds.ieee.org/ . Accessed 29 Nov 2017

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