An analog drive loop for a capacitive MEMS gyroscope-Reference-Cited by-同舟云学术

An analog drive loop for a capacitive MEMS gyroscope

Published:2009-09-23 Issue:3 Volume:63 Page:465-476
ISSN:0925-1030
Container-title:Analog Integrated Circuits and Signal Processing
language:en
Short-container-title:Analog Integr Circ Sig Process

Author:

Aaltonen L.,Halonen K. A. I.

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Hardware and Architecture,Signal Processing

Link

http://link.springer.com/content/pdf/10.1007/s10470-009-9395-6.pdf

Reference16 articles.

1. Yazdi, N., Ayazi, F., & Najafi, K. (1998). Micromachined inertial sensors. Proceedings of IEEE, 86(8), 1640–1659.

2. Geen, J. A., Sherman, S. J., Chang, J. F., & Lewis, S. R. (2002). Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation. IEEE Journal of Solid-State Circuits, 37(12), 1860–1866.

3. Saukoski, M., Aaltonen, L., Salo, T., & Halonen, K. (2008). Interface and control electronics for a bulk micromachined capacitive gyroscope. Sensors & Actuators: A. Physical, 147(1), 183–193.

4. Ajit, S., Zaman, M. F., Zucher, M., & Ayazi, F. (2008). A 0.1°/hr bias drift electronically matched tuning fork microgyroscope. In Proceedings of IEEE international conference on MEMS (pp. 6–9). Tucson, AZ.

5. M’Closkey, R. T., & Vakakis, A. (1999). Analysis of a microsensor automatic gain control loop. In Proceedings of American control conference (pp. 3307–3311). San Diego, CA.

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