Influence of CH3SiCl3 consistency on growth process of SiC film by kinetic monte carlo method

Author:

Liu Cuixia,Yang Yanqing,Luo Xian

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science

Reference18 articles.

1. Tan C, Wu X L, Deng S S. Blue Emission from Silicon-based β-SiC Films[J]. Physics Letters A, 2003, 310(2–3): 236–240

2. Ning X J, Pirouz P. The Microstructure of SCS-6 SiC Fiber[J]. Journal of Materials Research, 1991, 6(10): 2 234–2 248

3. Liu R J. Effect of Furnace Temperature on the Composition and Microstructure of SiC Coating by CVD[J]. Journal of National University of Defense Technology, 2002, 24(6):23–26

4. Liu C X, Yang Y Q, Zhang R J, et al. Kinetic Monte Carlo Simulation of {111}-Oriented SiC Film with Chemical Vapor Deposition[J]. Computational Materials Science, 2008, 43(4): 1 036–1 041

5. Yang L Sh, Zou W, Song M L, et al. Effect of Reaction Gas Mixing Ratio on Deposition Performance of C/SiC in ICVI Process[J]. Journal of Solid Rocket Technology, 2002, 25(3): 59–62

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