Author:
Jung Jae-Ryung,Yum Bong-Jin
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering
Reference19 articles.
1. Guo RS, Sachs E (1993) Modeling, optimization and control of spatial uniformity in manufacturing processes. IEEE Trans Semicond Manuf 6(1):41–57
2. Buie MJ, Pender JTP, Dahimene M (1998) Characterization of the etch rate non-uniformity in a magnetically enhanced reactive ion etcher. J Vac Sci Technol A16(3):1464–1468
3. Wang GJ, Chen JL, Hwang JY (2001) New optimization strategy for chemical mechanical polishing process. JSME Int J Ser C44(2):534–543
4. Taguchi G, Phadke MS (1984) Quality engineering through design optimization. In: Proceedings of GLOBECOM 84 Meeting, Atlanta, Georgia. pp. 1106–1113
5. Taguchi G, Yokoyama Y (1993) Taguchi methods: design of experiments, Quality engineering 4. ASI, Dearborn
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献