Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage-Reference-Cited by-同舟云学术

Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage

Published:2020-11-03 Issue:9-10 Volume:111 Page:2759-2772
ISSN:0268-3768
Container-title:The International Journal of Advanced Manufacturing Technology
language:en
Short-container-title:Int J Adv Manuf Technol

Author:

Kuo Fan-Chun,Hsu Chekang,Hsieh Meng-Ru,Yen Jia-Yush^ORCID,Chen Liang-Chia,Chung Tien-Tung,Wang Fu-Cheng

Funder

Ministry of Science and Technology, Taiwan

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Link

http://link.springer.com/content/pdf/10.1007/s00170-020-06274-x.pdf

Reference26 articles.

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2. PI (2020) V-731 High-precision XY stage. https://www.physikinstrumente.com/en/products/xy-stages/v-731-high-precision-xy-stage-1201908/. Accessed 6/5 2020

3. Aerotech (2020) Motion controllers. https://www.aerotech.com/product-catalog/motion-controller.aspx. Accessed 0608 2020

4. PI (2020) Controllers and drivers. https://www.physikinstrumente.com/en/products/controllers-and-drivers/. Accessed 0608 2020

5. Aerotech (2016) A3200 Acceleration and deceleration ramping overview. Aerotech A3200 user manual

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