Finishing of Ge nanomachined surfaces for X-ray crystal optics

Author:

Jergel MatejORCID,Halahovets Yuriy,Maťko Igor,Korytár Dušan,Zápražný Zdenko,Hagara Jakub,Nádaždy Peter,Šiffalovič Peter,Kečkéš Jozef,Majková Eva

Funder

Agentúra na Podporu Výskumu a Vývoja

Agentúra Ministerstva Školstva, Vedy, Výskumu a Športu SR

Vedecká Grantová Agentúra MŠVVaŠ SR a SAV

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Software,Control and Systems Engineering

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Testing of thickness homogeneity of Si crystal membranes using GaAs Timepix detector;Journal of Instrumentation;2021-06-01

2. Study of subsurface damage in Ge optics machined by SPDT;2020 13th International Conference on Advanced Semiconductor Devices And Microsystems (ASDAM);2020-10-11

3. Compressive strain formation in surface-damaged crystals;Journal of Applied Crystallography;2020-04-23

4. Study of surface quality and subsurface damage of germanium optics produced by single point diamond nanomachining;EUV and X-ray Optics: Synergy between Laboratory and Space VI;2019-04-26

5. Exploiting the potential of beam-compressing channel-cut monochromators for laboratory high-resolution small-angle X-ray scattering experiments;Journal of Applied Crystallography;2019-04-18

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