An investigation of the mechanical behavior of initially curved microplates under electrostatic actuation
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
http://link.springer.com/article/10.1007/s00707-018-2141-3/fulltext.html
Reference34 articles.
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3. Maillefer, D., van Lintel, H., Rey-Mermet, G., Hirschi, R.: A high-performance silicon micropump for an implantable drug delivery system. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems MEMS’99 (1999)
4. Je, C.H., Lee, J., Yang, W.S., Kim, J., Cho, Y.-H.: A surface-micromachined capacitive microphone with improved sensitivity. J. Micromech. Microeng. 23(5), 055018 (2013)
5. Suresh, K., Uma, G., Umapathy, M.: Design of a resonance-based mass sensor using a self-sensing piezoelectric actuator. Smart Mater. Struct. 21(2), 025015 (2012)
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