Microlens array fabrication by backside exposure using Fraunhofer diffraction

Author:

Song In-Hyouk,Kang Kyung-Nam,Jin Yoonyoung,Park Daniel S.-W.,Ajmera Pratul K.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. UV-curable Polydimethylsiloxane Photolithography and Its Application to Flexible Mechanical Metamaterials;Sensors and Materials;2023-06-27

2. Microfabrication of 3D structures by projection optical system;Optical Technology and Measurement for Industrial Applications Conference 2022;2022-12-08

3. Design, fabrication, and characterization of a multidimensional prism;Applied Optics;2019-02-14

4. Aspherical Lens Design Using Computational Lithography;Precision Engineering;2017-10

5. Large Height Micro-Lens-Array Fabrication by Projection Optics with Adjustable NA;Journal of the Japan Society for Precision Engineering;2015

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