Manufacturing of microstructures with high aspect ratio by micromachining
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/s00542-007-0535-6.pdf
Reference2 articles.
1. Baier K, Lehndorff M, Katz A (2004) Mikroproduktion, No. 1, pp 27–29
2. Gietzelt T, Eichhorn L (2007) Galvanotechnik, Heft 6, pp 1504–1514
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