Optimization of MEMS capacitive accelerometer

Author:

Benmessaoud Mourad,Nasreddine Mekkakia Maaza

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Amini BV (2006) A mixed-signal low-noise sigma-delta interface IC for integrated sub-micro-gravity capacitive SOI accelerometers. Dissertation, School of Electrical and Computer Engineering, Georgia Institute of Technology

2. Bais B, Majlis BY (2008) Low-g Area-changed MEMS accelerometer using bulk silicon technique. Institute of Microengineering and Nanoelectronics (IMEN), University Kebangsaan Malaysia 43600 UKM Bangi, Selangor, Malaysia. Am J Appl Sci 5(6):626–632 ISSN 1546–9239

3. Gupta V, Mukherjee T (2012) Layout synthesis of CMOS MEMS accelerometers. Department of ECE, Carnegie Mellon University, Pittsburgh, PA-15213

4. Kuan LC (2008) Wireless MEMS accelerometer for real-time. Dissertation, Department of Electrical Engineering and Computer Science, Case Western Reserve University

5. Luo H, Zhang G, Carley LR, Fedder GK (2002) A post-CMOS micromachined lateral accelerometer. J Micro Electro Mech Sys 11(3):188–195

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