Modeling of materials synthesis in hybrid plasma reactors: Production of silicon by thermal decomposition of SiCI4-Reference-Cited by-同舟云学术

Modeling of materials synthesis in hybrid plasma reactors: Production of silicon by thermal decomposition of SiCI4

Published:1990-06 Issue:3 Volume:21 Page:589-598
ISSN:0360-2141
Container-title:Metallurgical Transactions B
language:en
Short-container-title:MTB

Author:

McKelliget John W.,El-Kaddah Nagy

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics,Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics

Link

http://link.springer.com/content/pdf/10.1007/BF02667872.pdf

Reference19 articles.

1. Plasma Processing of Materials, NMAB-415, Committee on Plasma Processing of Materials, National Materials Advisory Board, Feb. 22, 1985.

2. P. Fauchais and J.M. Baronnet:Pure Appl. Chem., 1980, vol. 52, pp. 1669–1705.

3. S. M. L. Hamblyn and B.G. Reuben: inAdvances in Inorganic Chemistry and Radiochemistry, H. Emeleus and A. Sharpe, eds., Academic, New York, NY, 1975, vol. 17, pp. 89–114.

4. T. B. Reed:J. Appl. Phys., 1961, vol. 32, p. 821.

5. J. D. Chase:J. Appl. Phys., 1971, vol. 42, pp. 4870–79.

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