Characterization of sol–gel thin films by ellipsometric porosimetry

Author:

Löbmann Peer

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Condensed Matter Physics,Biomaterials,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference55 articles.

1. Aspnes DE (2013) Spectroscopic ellipsometry—A perspective. J Vac Sci Technol A 31(5):058502-1-14

2. Canepa M (2013) A Surface Scientist’s View on Spectroscopic Ellipsometry. In: Bracco G, Holst B (eds) Surface Science Techniques, Springer Series in Surface Sciences 51. Springer, Berlin Heidelberg, pp 99–135

3. Aspnes DE (2014) Spectroscopic ellipsometry—Past, present, and future. Thin Solid Films 571:334–344

4. Langereis E, Heil S, H., Keuning W, van de Sanden M, Kessels W (2009) In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition. J Phys D Appl Phys 42:073001

5. Matsubara T, Oishi T, Katagiri A (2002) Determination of Porosity of TiO2 Films from Reflection Spectra. J Electrochem Soc 149(2):C89–C93

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