Effect of water content on the structural properties of porous methyl-modified silicate films

Author:

Vishnevskiy A. S.,Seregin D. S.,Vorotilov K. A.ORCID,Sigov A. S.,Mogilnikov K. P.,Baklanov M. R.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Condensed Matter Physics,Biomaterials,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Baklanov MR, Vanstreels K, Wu C, Li Y, Croes K (2016) Low dielectric constant materials for nanoelectronics In: Narayanan V, Frank MM, Demkov AA (eds) Thin films on silicon. Electronic and photonic applications, World Scientific, Singapore

2. Schneller T et al. (eds) (2013) Chemical solution deposition of functional oxide thin films. Springer, Wien

3. Guglielmi M et al. (eds) (2014) Sol–gel nanocomposites. Advances in sol-gel derived materials and technologies. Springer, New York, NY

4. Baklanov MR, Ho PS, Zschech E (eds) (2012) Advanced interconnects for ULSI technology. Wiley, New York, NY

5. Grill A, Gates SM, Ryan TE, Nguyen SV, Priyadarshini D (2014) Appl Phys Rev 1:011306

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