An experimental study on semiconductor process chiller using the digital scroll compressor-Reference-Cited by-同舟云学术

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An experimental study on semiconductor process chiller using the digital scroll compressor

Published:2014-08 Issue:8 Volume:28 Page:3345-3352
ISSN:1738-494X
Container-title:Journal of Mechanical Science and Technology
language:en
Short-container-title:J Mech Sci Technol

Author:

Cha Dong An,Kwon Oh Kyung,Oh Myung Do

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/s12206-014-0745-7.pdf

Reference10 articles.

1. KIPO, Technology trends in semiconductor process and equipment Industry, Intellectual Property, 21 (62) (2000) 136–149.

2. Semiconductor equipment and materials industry status report, KISA (2009) 1–10.

3. Y. C. Park, Semiconductor cleaning process equipment technology trend, KSIA (2009) 51–60.

4. D. A. Cha, O. K. Kwon and M. D. Oh, Experimental study of process chiller for semiconductor temperature control, Trans. of the KSME B, 35 (5) (2011) 459–465.

5. State of art technology in semiconductor equipment, KISTI (2009) 1–36.

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3. Comparative Analysis and Experimental Study on Single-Wrap and Double-Wrap Scroll Compressor;2020 3rd World Conference on Mechanical Engineering and Intelligent Manufacturing (WCMEIM);2020-12

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