Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Department of Science and Technology of the Jilin Province
Education Department of Jilin Province
Jilin Provincial Key Laboratory of Ultrafast and Extreme Ultraviolet Optics, China
"111" Project of China, China
Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, China
Publisher
Springer Science and Business Media LLC