Author:
Douhan R. M. H.,Kokhanenko A. P.,Lozovoy K. A.
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy
Cited by
2 articles.
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1. Reduction of Residual Stresses in Aluminum Oxide Films by Ion-Plasma Methods;2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE);2024-02-29
2. Growth of Germanium Quantum Dots on Oxidized Silicon Surface;Russian Physics Journal;2020-06