Generation and registration of disturbances in a gas flow. 1. Formation of arrays of tubular microheaters and microsensors

Author:

Seleznev V. A.,Prinz V. Ya.,Aniskin V. M.,Maslov A. A.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics

Reference13 articles.

1. C.-M. Ho and Y.-C. Tai, “Review: MEMS and its applications for flow control,” J. Fluid Eng., 118, No. 9, 437–447 (1996).

2. T. Tsao, C. Liu, Y.-C. Tai, and C. M. Ho, “Micromachined magnetic actuator for active fluid control,” in: P. R. Banyopadhyay, K. S. Breuer, and C. J. Biechinger (eds.), Application of Micromachined to Fluid Mechanics, ASME, Los Angeles (1994), p. 31–38.

3. A. N. Shiplyuk, V. A. Seleznev, and V. M. Aniskin, “Hot-wire probe,” RF Patent No. 2207576, G 01 P 5/12, Published 06.27.2003.

4. V. A. Seleznev and V. Ya. Prinz, “Method for fabrication of a gauge for measuring the gas and fluid velocity,” RF Application No. 2007129547, 8 G 01 P 5/10, Published 08.01.2007.

5. V. Ya. Prinz, V. A. Seleznev, and A. K. Gutakovsky, “Self-formed InGaAs/GaAs nanotubes: Concept, fabrication, properties,” in: Proc. 24th Int. Conf on the Physics of Semiconductors, World Scientific, S. 1. (1999);

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