Size effect on the static behavior of electrostatically actuated microbeams
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Link
http://link.springer.com/content/pdf/10.1007/s10409-011-0449-z.pdf
Reference33 articles.
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4. Abel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12(6), 759–766 (2002)
5. Younis, M.I., Abdel-Rahman, E.M., Nayfeh, A.H.: A reducedorder model for electrically actuated microbeam-based MEMS. Journal of Microelectromechanical Systems 12(5), 672–680 (2003)
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