Structural and Mechanical Analysis of APCVD Deposited Diamond-Like Carbon Thin Films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-020-00760-3.pdf
Reference34 articles.
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2. Cheng, Y., Lu, Y., Huang, G., Guo, Y., Xi, L., Wang, S., & Tian, F. (2019, 11). Infrared and mechanical properties of the oxygen-doped non-hydrogenated diamond-like carbon film prepared by pulsed laser deposition. Infrared Physics & Technology, 102, 102983. https://doi.org/10.1016/j.infrared.2019.102983
3. Polyakov VI, Mityagin AY, Rukovishnikov AI, Druz B, Zaritsky I, Yervtukchov Y (2006) Effect of various adsorbates on electronic states of the thin diamond-like carbon films. Diam Relat Mater 15:1926–1929. https://doi.org/10.1016/j.diamond.2006.06.001
4. Bootkul D, Intarasiri S, Aramwit C, Tippawan U, Yu LD (2013) Formation of thin DLC films on SiO2/Si substrate using FCVAD technique. Nucl Instrum Methods Phys Res, Sect B 307:147–153. https://doi.org/10.1016/j.nimb.2013.02.037
5. Smietana M, Bock WJ, Szmidt J, Grabarczyk J (2010) Substrate effect on the optical properties and thickness of diamond-like carbon films deposited by the RF PACVD method. Diam Relat Mater 19:1461–1465. https://doi.org/10.1016/j.diamond.2010.08.012
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