Prediction of Surface Roughness in Hybrid Magnetorheological Finishing of Silicon Using Machine Learning
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Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s12633-024-02989-8.pdf
Reference46 articles.
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3. Jarin S, Saleh T, Muthalif AGA et al (2018) Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining. Int J Adv Manuf Technol 99:3005–3015. https://doi.org/10.1007/s00170-018-2692-4
4. Ghosh G, Sidpara A, Bandyopadhyay PP (2021) Experimental and theoretical investigation into surface roughness and residual stress in magnetorheological finishing of OFHC copper. J Mater Process Technol 288. https://doi.org/10.1016/j.jmatprotec.2020.116899
5. Singh J, Singh G, Pandey PM (2020) Electric discharge machining using rapid manufactured complex shape copper electrode: Parametric analysis and process optimization for material removal rate, electrode wear rate and cavity dimensions. Proc Inst Mech Eng C J Mech Eng Sci 234:2459–2473. https://doi.org/10.1177/0954406220906445
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1. Experimental Investigation into Double-disc and Chemically Assisted Magnetorheological Finishing Process;Silicon;2024-09-05
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