Effect of Different Ambient Atmospheres on the Damage Caused to Silicon by 1064-nm Laser Pulses-Reference-Cited by-同舟云学术

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Effect of Different Ambient Atmospheres on the Damage Caused to Silicon by 1064-nm Laser Pulses

Published:2024-07-23 Issue:13-14 Volume:16 Page:5431-5438
ISSN:1876-990X
Container-title:Silicon
language:en
Short-container-title:Silicon

Author:

Guo Ming,Zhang Yong-xiang,Zhang Wen-ying,Li Nan,Cai Ji-xing

Funder

Horizontal projects

Science and Technology Development Plan Project of Jilin Province in 2022, Quantum information Technology Innovation Team

Science and Technology Plan of Jilin Province

Publisher

Springer Science and Business Media LLC

Link

https://link.springer.com/content/pdf/10.1007/s12633-024-03093-7.pdf

Reference10 articles.

1. Chen L, Liu Z, Guo C (2022) Nanosecond laser-induced controllable periodical surface structures on silicon. Chin Opt Lett 20:013802

2. Choi S, Jhang KY (2014) Thermal damages on the surface of a silicon wafer induced by a near-infrared laser. Opt Eng 53:017103

3. Ohmura E, Fukuyo F, Fukumitsu K (2006) Internal modified-layer formation mechanism into silicon with nanosecond laser. J Achiev Mater Manuf Eng 17:381–384

4. Zeng X, Mao XL, Greif R (2005) Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon. Appl Phys 80:237–241

5. Juntong Z, Su Z, Qiang F (2020) Laser polarization characteristics of visible light band in different humidity environments. Infrared Laser Eng 49:20200057-1–20200057-7

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