Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method

Author:

Todorovic D. M.,Rabasovic M. D.,Markushev D. D.,Jovic V.,Radulovic K. T.

Funder

Serbian Ministry of Education and Science

Publisher

Springer Science and Business Media LLC

Subject

Condensed Matter Physics

Reference18 articles.

1. A. Mandelis (ed.), Photoacoustic and Thermal Wave Phenomena in Semiconductors (Elsevier, New York, 1987)

2. A. Mandelis, P. Hess (eds.), Semiconductors and Electronic Materials, Vol. IV in the Series: Progress in Photothermal and Photoacoustic Science and Technology (SPIE Press, Bellingham, 2000)

3. D.M. Todorovic, P.M. Nikolic, Semiconductors and Electronic Materials, Ch. 9, in the Series: Progress in Photothermal and Photoacoustic Science and Technology (Optical Engineering Press, New York, 2000), pp. 273–318

4. D.M. Todorovic, M.D. Rabasovic, D.D. Markushev, V. Jovic, K.T. Radulovic, Investigation of micromechanical structures by photoacoustic elastic bending method. Int. J. Thermophys. 33, 2222–2229 (2012)

5. D.M. Todorovic, D.D. Markushev, M.D. Rabasovic, K.T. Radulovic, V. Jovic, Photoacoustic elastic bending method: study of the silicon membranes, in Proceedings of 28th International Conference on Microelectronics (MIEL 2012), Niš, Serbia, 13–16 May, 2012, pp. 169–172

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