Quantitative Measurement of Squeeze Flow Distribution in Nanogaps by Particle Image Velocimetry Using Quantum Dots-Reference-Cited by-同舟云学术

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Quantitative Measurement of Squeeze Flow Distribution in Nanogaps by Particle Image Velocimetry Using Quantum Dots

Published:2023-09-19 Issue:4 Volume:71 Page:
ISSN:1023-8883
Container-title:Tribology Letters
language:en
Short-container-title:Tribol Lett

Author:

Azuma Naoki,Ozeki Hidetaka,Miki Katsuki,Fukuzawa Kenji,Itoh Shintaro,Zhang Hedong

Funder

NSK Foundation for the Advancement of Mechatronics

JST ACT-X

Tokai Pathways to Global Excellence

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Link

https://link.springer.com/content/pdf/10.1007/s11249-023-01783-8.pdf

Reference33 articles.

1. Berman, D., Krim, J.: Surface science, MEMS and NEMS: progress and opportunities for surface science research performed on, or by, microdevices. Prog. Surf. Sci. 88, 171–211 (2013). https://doi.org/10.1016/j.progsurf.2013.03.001

2. Barcelo, S., Li, Z.: Nanoimprint lithography for nanodevice fabrication. Nano Converg. 3, 21 (2016). https://doi.org/10.1186/s40580-016-0081-y

3. Fischer, A.C., Forsberg, F., Lapisa, M., Bleiker, S.J., Stemme, G., Roxhed, N., Niklaus, F.: Integrating MEMS and ICs. Microsyst. Nanoeng. 1, 15005 (2015). https://doi.org/10.1038/micronano.2015.5

4. Midolo, L., Schliesser, A., Fiore, A.: Nano-opto-electro-mechanical systems. Nat. Nanotechnol. 13, 11–18 (2018). https://doi.org/10.1038/s41565-017-0039-1

5. Zhang, W.M., Yan, H., Peng, Z.K., Meng, G.: Electrostatic pull-in instability in MEMS/NEMS: a review. Sens. Actuator A. 214, 187–218 (2014). https://doi.org/10.1016/j.sna.2014.04.025

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