Stress development of direct-patternable PZT film for applying to micro-detecting system-Reference-Cited by-同舟云学术

Stress development of direct-patternable PZT film for applying to micro-detecting system

Published:2006-12 Issue:2-4 Volume:17 Page:805-809
ISSN:1385-3449
Container-title:Journal of Electroceramics
language:en
Short-container-title:J Electroceram

Author:

Bae Sang Woo,Kang Ghi Yuun,Park Hyung-Ho,Kim Tae-Song

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10832-006-7238-8.pdf

Reference19 articles.

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4. R. Tomas, S, Mochizuki, T. Mihara, and T Ishida, Thin Solid Films, 443, 14 (2003).

5. C. Soyer, E. Cattan, D. Remiens, and M. Guilloux-viry, J. Appl. Phys., 92, 1048 (2002).

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