Author:
Chen Jia-he,Yang De-ren,Que Duan-lin
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Reference36 articles.
1. Semiconductor Industry Association. The International Technology Roadmap for Semiconductors (2005 edition). San Jose, California, 2005
2. Arden W. Future semiconductor material requirements and innovations as projected in the ITRS 2005 roadmap. Materials Science and Engineering: B, 2006, 134(2–3): 104–108
3. Mozer A P. New developments in silicon Czochralski crystal growth and wafer technology. Materials Science and Engineering: B, 2000, 73(1–3): 36–41
4. Yu X, Yang D, Ma X, et al. Grown-in defects in nitrogendoped Czochralski silicon. Journal of Applied Physics, 2002, 92(1): 188–194
5. Chen J, Yang D, Li H, et al. Enhancement effect of germanium on oxygen precipitation in Czochralski silicon. Journal of Applied Physics, 2006, 99(7): 073509 (5 pages)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献