Influence of deposition temperature on the structure and optical properties of HfO2 thin films
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11706-008-0066-9.pdf
Reference17 articles.
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4. Xing S, Zhang N L, Song Z T, et al. Preparation of hafnium oxide thin film by electron beam evaporation of hafnium incorporating a post-thermal process. Microelectronic Engineering, 2003, 66(1–4): 451–456
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