1. J. Melngailis, J. Vac. Sci. Technol. B 5, 469 (1987).
2. D. K. Stewart, A. F. Doyle and J. D. Casey, Proc. SPIE 2437, 276 (1995).
3. S. Reyntjens, D. De Bruyker and R. Puers, Proceedings of 1998 Microsystem Symposium (Delft, the Netherlands, 1998) p. 125.
4. B. W. Ward, N. P. Economou, D. C. Shaver, J. E. Ivory, M. L. Ward and L. A. Stern, Microcircuit modification using focused ion beams. Proc. SPIE 923, 92 (1988).
5. J. Glanville, Solid State Technol. 32, 270 (1989).