1. Kim, S.H., Asay, D.B., Dugger, M.T.: Nanotribology and MEMS. Nanotoday 2, 22–29 (2007)
2. Maboudian, R., Howe, R.T.: Critical review: Adhesion in surface micromechanical structures. J. Vac. Sci. Technol. B 15, 1–20 (1997)
3. Tanner, D.M., Walraven, J.A., Irwin, L.W., Dugger, M.T., Smith, N.F., Eaton, W.P., Miller, W.M., Miller, S.L.: The effect of humidity on the reliability of a surface micromachined microengine. IEEE international reliability physics symposium, March 21–25, San Diego, 189–197 (1999)
4. Bhushan, B.: Modern tribology handbook, vol. 2. CRC Press, Boca Raton (2001)
5. Bhushan, B.: Applications of micro/nano tribology to magnetic storage devices and MEMS. Tribol. Int. 28, 85–96 (1995)