Author:
Marek Jiri,Gómez Udo-Martin
Publisher
Springer Berlin Heidelberg
Reference14 articles.
1. Nathanson, H.C., Newell, W.E., Wickstrom, R.A., Davis Jr., J.R.: The resonant gate transistor. IEEE Trans. Elec. Dev. 14(3), 117–133 (1967)
2. Angell, J.B., et al.: Silicon micromechanical devices. Sci. Am. 248(4), 44 (1983)
3. Petersen, K.E.: Silicon as a mechanical material. Proc. IEEE. 70, 420 (1982)
4. Global MEMS market suffers first-ever decline in 2008. iSuppli Corporation, 2009 ( http://www.isuppli.com/News/Pages/Global-MEMS-Market-Suffers-First-Ever-Decline-in-2008.aspx )
5. Armbruster, S. et al.: A novel micromachining process for the fabrication of monocrystalline Si-membranes using porous silicon. TRANSDUCERS 2003. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Vol. 1, pp. 246–249. DOI: 10.1109/SENSOR.2003.1215299
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献