1. Ding, H., Xiong, Z.H.: Motion Stages for Electronic Packaging Design and Control. J. IEEE Robotics and Automation Magazine 13, 51–61 (2006)
2. Zhong, J., Chen, X.L.: Coupling and Decoupling Design of Complex Electromechanical Systems. J. China Mechanical Engineering 10, 1051–1054 (1999)
3. Paynter, H.M.: Analysis and Design of Engineering Systems. MIT, Cambridge (1961)
4. Karnopp, D.C., Margolis, D.L., Rosenberg, R.C.: System Dynamics Modeling and Simulation of Mechatronic Systems. John Wiley & Sons Inc., Chichester (2000)
5. http://www.h2wtech.com , http://www.deltatau.com , http://www.asmpacific.com