1. M. Kominsky, R. Nielsen and P. Zschack, J. Vac. Sci. Technol.
20 (1982) 1304.
2. R. A. Langley, L. C. Emerson, J. B. Whitley and A. W. Mullendore, J. Nuclear Mater.
93&94 (1980) 479.
3. J. Y. Rossignol, F. Langlais and R. Naslain, in “Proceedings of the Ninth International Conference on CVD”, edited by M. Robinson, C. H. J. van den Brekel, G. W. Cullen, J. M. Blocher Jr and P. Rai-Choudhury (Electrochemical Society, Pennington, PA, 1984) p. 596.
4. L. Aggour, E. Fitzer and J. Schlichtinhg, in “Proceedings of the Fifth International Conference on CVD”, edited by J. M. Blocher, Jr, G. E. Vuillard and G. Wahl (Electrochemical Society, Pennington, PA, 1981) p. 142.
5. M. Klein and B. M. Gallois, in “Chemical Vapor Deposition of Refractory Metals and Ceramics”, edited by T. M. Besmann and B. M. Gallois. Symposium Proceedings, Vol. 168, (Materials Research Society, Pittsburgh, PA, 1989) p. 93.