Determination of energy and mass distributions of ions and neutral particles in magnetron-ionplating-Reference-Cited by-同舟云学术

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Determination of energy and mass distributions of ions and neutral particles in magnetron-ionplating

Published:1991 Issue:5-6 Volume:341 Page:353-356
ISSN:0937-0633
Container-title:Fresenius' Journal of Analytical Chemistry
language:en
Short-container-title:Fresenius J Anal Chem

Author:

D�tter W.,Barzen I.,Keller G.,Erz R.,Ulrich S.,Jung K.,Ehrhardt H.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry,Biochemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00321935.pdf

Reference10 articles.

1. Davis WD, Vanderslice TA (1983) Phys Rev 131:219?228

2. Coburn JW (1970) Rev Sci Instrum 41:1219?1223

3. Coburn JW, Kay E (1979) Solid State Technol 22:117?124

4. Oechsner H (1984) In: Oechsner H (ed) Thin film and depth profile analysis, Springer, Berlin Heidelberg New York

5. Weakliem HA, Estes RD, Longeway PA (1987) J Vac Sci Technol A5:29?36

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